Halbleiter und Prozesstechnik

Precise sealing

Semiconductors, flat screens and solar, deposition, etching, coating, plasma and thermal processing or annealing are just some of the processing methods that take place in chemical environments. These applications are very demanding for the elastomer sealing materials used. Other examples include integrated semiconductor circuits, flat screens, solar cells, MEMS (micro-electronic mechanical systems) or LED/OLED.

The elastomer materials used depend on the process chemicals used, the temperature, the specific assembly part position, proximity to the substrate, the type of device manufactured and the technology node.